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I'm using azure ARM templates to deploy VMs. Is there any way to configure diagnostics logs to the table storage using ARM templates.

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Here is the link which helps to enable VM diagnostic logs. Please note when you enable the diagnostic logs for the virtual machines , the logs are automatically stored in storage account tables.

Below are few tables and information stored in them

WADDiagnosticInfrastructureLogsTable - Diagnostic monitor and configuration changes WADPerformanceCountersTable - Performance counters
WADWindowsEventLogsTable - Windows Event Logs